Product introduction
inSync has creatively developed MEMS Mirror Array (MMA) technologies, which is the only achieved super-large aperture (increase the maximum aperture area by ~10 times, which can greatly improve the optical scanning performance such as LiDAR), while retaining the advantages of MEMS high reliability/integration and low cost. It can also 100% pass AEC-Q G2 reliability test.
Product advantages
MEMS Mirror Array （MMA） technology enables vivid, crisp light scanning quality forLiDAR/HUD/Medical/AR applications.
InSync 1D-MEMS with bar laser and detector or hybrid-2D MEMS can significantly optimize LiDAR system architecture and simplify optical -mechanical system，to reduce the module size, to generate a unified point cloud, and also improve the system reliability.
Our products can help to improve LiDAR scanning performance, such as points cloud, resolution, detection range with the large optical aperture and FoV, and dramatically cost down at the same time.
With the MEMS array design, we are able to customized FoV/Freq./Size/packaging MEMS mirrors very quickly. Also, we offer ample support resources such as evaluation kits, reference designs, software and on-site support to ease your design process.
Technological Innovation
Micro machined mirror array with innovated synchronous resonance technology to achieve super Large optical aperture for LiDAR/HUD/AR application.
Adopting integrated electrostatic driving technology to achieve precise scanning, integrated driving, and simple external interface.
The temperature can be compensated by the drive and sense comb structure, furthuremore, the scanning angle canbe detected and calculated by the capacitor sensing. The innovated functionality reduce external temperature compensation and angle detection circuit.
The designed large-area bottom silicon substrate structure is perfect conducive material for rapid heat dissipation, with good heat dissipation effect, making the MEMS mirror capable of high-power laser irradiation.
Product list
| Category | Picture | Mirror Size (mm) | Package Size (mm) | Frequency (Hz) | Optical angle ° | AEC Q test | Shock test |
|---|---|---|---|---|---|---|---|
| A290 (download) |
 |
17*17 | 18.2*18.2 | 2K | ±7.5 | Full compliance | >1500G |
| A150 (download) |
 |
8.5*17 | 9.1*18.2 | 2K | ±12.5 | Full compliance | >1500G |
| A80 (download) |
 |
8*8 | 9.1*9.1 | 2K | ±12.5 | Full compliance | >1500G |
Technical overview
The manufacturing process of inSync mems mirror array is based on BOSCH DRIE fast switch of SI etching and polymer deposition. The precision of MEMS mechanical structure is in um controlled. The drive and sense micro system is well-deisgned comb structure. With dozens of synchronized resonace micro mirrors, we can achieve super-large aperture size with high reliability.
inSync is a MEMS enterprise engaged in R&D, manufacturing and application of automotive/Industry/Consumer/Medical. The company is dedicated focus in MEMS actuators, devices, sensors, and application system
Details备案号码：沪ICP备2023016714号
